Zeiss DCG Z-Series nProber SEM with EBC HAS and TCP Upgrades

Location:   North America Still Installed Inspection recommended DCG Z-Series nProber SEM with EBC HAS and TCP Upgrades Features and Benefits: nProber nanoprobing system is designed and optimized to electrically probe sub-100nm features on semiconductor devices with superior ease-of-use and throughput. The system consists of a state-of-the-art Nanomanipulator, A high resolution and low kV Zeiss Supra FE-SEM, an industry standard parametric analyzer, an advanced anti-contamination system, and custom software to control and integrate each component. The nProber dramatically increases throughput without sacrificing ease-of-use. The system guides the user through each application while remaining flexible enough for advanced probing experiments. The semi-automated system has eight encoded positioners for increased probing capability and throughput. The XYZ encoded center stage provides step and repeat capability allowing the probes to remain in place while the sample is moved to the next bit. The nProber also provides vision feedback capability for point-and-click positioning of the probes and center stage. All of this can be combined with a CAD Navigation software suite to quickly locate and move to the area of interest. An easy-to-use Windows based software platform seamlessly integrates all of the components of the nProber. The FEG SEM provides the optimal resolution, video rates, beam shift, vacuum technology, and user control required for IC nanoprobing. The nProber’s electrical characterization system is specifically designed for low-noise measurements. Advanced anti-contamination system rigorously cleans the SEM enabling the user to achieve superior ohmic contact. The system is also a platform for future applications packages as materials, geometries, and technologies evolve. The nProber is the complete and proven solution for IC failure analysis at the leading edge technology node. Applications Electrical characterization for device quality or failure analysis 8-point probing 6-point probing 4-point probing Butterfly curves Kelvin probing Bitcell stability testing Contact-level probing Metal 1-level probing