KLA 2132 Wafer Inspection System

Contact us for price

orCall +353 (0) 87 192 1110

Description

Serial number W21XX639 can be sold "as is" or operational to oem specs. Deinstalled by KLA, Warehoused, barrier bagged. The system was deinstalled in september 2002 and until that date was upgraded with various hardware and software upgrades. Facilities: 120v 3 phase 25A per phase KLA2132 Board Configuration *************************** MAIN CARD CAGE DP 710-683424-001 REV AA DF 710-661726-00 BD1 API 710-658036-00 REV C1 API 710-658041-20 REV E0 UP 710-658046-00 REV F0 XINT 710-658176-00 REV A0 YINT 710-658172-00 REV H0 XINT 710-658176-00 REV A0 YINT 710-658172-00 REV H0 CT 710-655651-20 REV C0 CT 710-655651-20 REV C0 MM 710-659412-00 REV C0 MM 710-659412-00 REV C0 MC 710-658232-20 REV H0 IF1 710-658086-20 REV E0 AUXILIARY CARD CAGE ******************* DF 710-678525-001 REV AB DD 710-650044-20 REV DB0 DP 710-678545-00 REV B1 RTF 710-652840-20 REV D3 710-659485-20 REV?? General Description ------------------- The KLA 2132 is capable of inspecting at the following rates: Sensitivity: 0.62 ------- Speed: 5 sec/cm2 Sensitivity: 0.39 ------- Speed: 15 sec/cm2 Sensitivity: 0.25 ------- Speed: 30 sec/cm2 and includes the following:- wafer inspection module for 4, 5, 6 or 8 inch wafer size SUBSTRATES: For silicon wafers conforming to SEMI standard M1.1 Wafer diameter (mm): 100 100 125 150 200 Wafer thickness (?m): 525 625 625 675 725 SENSITIVITY AND INSPECTION SPEED: Die to Die Mode Sensitivity (um) Speed (sec/cm2) 0.60 05 0.50 1.5 0.40 15 Cell to Cell Mode Sensitivity (um) Speed (sec/cm2) 0.30 05 0.25 30 0.20 15 Full performance specifications are available on request

Specifications

ConditionUsed