IPEC 676 Automated CMP Tool

IPEC 676 Automated CMP Tool Standard Features Include: - Four wafer planarizers - Three cassette tilter load/unload station - Advanced pad motion control - High speed polish drive (0-600 RPM) - Closed loop delta P control - Endpoint detection system - Stainless steel polish bell - Dual pad conditioning systems - Upgraded 500MHz Pentium Facilities - Dimensions: Width: 82” Depth: 69” Height: 102” - Electrical, 120/208 VAC WYE 3 Phase, 60 Hz, 60 Amps Max. - DI Water: 50psi / 5gpm