AMAT AKT 1600 PECVD
AMAT AKT 1600 PECVD
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Description
Tool Model : AMAT 1600 PECVD • Vintage 2005 • Process: PECVD iN,SiO2, i-a-Si, SiON and N+ a-Si • SoFware Version: AKT7.3 • System Power RaNng: 208 VAC 3- Phase • Flat panel size: 320 x 352 mm • (5) Process chambers: • Film Capability SiN • SiO2 • i-a-Si • SiON • N+ a-Si (Remote Plasma Clean) Includes: • Chillers
Specifications
| Manufacturer | AMAT |
| Model | AKT 1600 |
| Year | 2005 |
| Condition | Used |
| Stock Number | OD41219-3 |
| Wafer Size | 320mm x352mm |