AMAT Centura5200 MxP+ 3 chamber 200mm
AMAT Centura5200 MxP+ 3 chamber 200mm
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Description
The AMAT Centura5200 MxP+ 3 chamber 200mm is in nearly refurbished condition except MFC inside gas panel.
No part missing and power-on inspection is possible.
(MxP+ Polymide ESC Type. Widebody Loadlock)
Specifications
Manufacturer | AMAT |
Model | Centura MXP+ |
Year | 1995 |
Condition | Used |
Stock Number | god221120191 |
Wafer Size | 200mm |