Alcatel SCM 650 Sputtering system 4" & 6 inch wafers Refurbished

ALCATEL SCM 650 Sputter APPLICATION: RF / DC sputtering. (with or without bias):   Ionic cleaning. CATHODES: 2 magnetron targets 200mm diameter. SUBSTRATE TRANSPORT LOAD LOCK: for 150mm diameter substrates. SUBSTRATE HOLDER: 4 stations. 6 indexed positions 4 transfer + 2 sputtering positions) Continuous rotation 1 to 30 r.p.m. Vertical translation 50 to 100mm SHUTTER: One 3/4 automatic shutter. GENERATORS: 1 RF-Generator (2000 W) for the targets 1 and 2 and the substrate-holder 1 DC-Generator (3000 W) for the targets 1 and 2 GAS LINES: 2 lines DIMENSIONS: Width 2970mm. : Height 1930mm.: Depth 1800 mm