2012 Aixtron AIX 2800 G4 WW

Wafer Sizes: 6"/150mm

Vintage: 2012

SiC EPI Reactor

Multi-wafer reactor

The system is still installed and running with no known issues

Cabinet with stainless steel lining

Stainless steel reactor chamber, water cooled including:n

Triple gas inlet, actively cooled, Version 2

Top flow channel: purge/ carrier gas

Center flow channel: all process gases

Bottom flow channel: purge/ carrier gas incl. HCl

Double-O-Ring system

In-situ monitoring viewport from top

Ferrofluidics feedthrough for main rotation

Coated graphite planetary disk (Version2), sandwich design

Coated graphite wafer holder (satellite) with Gas Foil Rotation (patented)

Insulating ceiling (version 2, patented)

Exhaust collector manifold (version 2)

Tool kit for susceptor adjustment