Applied Materials Centura PVD
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Description
Working Condition 2 sets, one still in clean room Second tool * Warehouse storage (see photo) * Parts some missing (See Inspection DATA) 1. Main Frame PVD 200mm 2. Process Chamber TiN ? 2 3. Orient Degas Chamber ? 1 4. Fast Cool Down Chamber ? 1 5. Generator Rack-1 ? 1 6. Remote AC Rack 0190-76118 ? 1 Missing Parts List 1. Neslab Chiller 0190-76118 Missing 1 2. Cool Chamber Upper Missing 1 3. PVD DC Power Supply 3KV 0190-01893 Missing 1 4. Heater Driver Missing 2 5. SBC BD Missing 1 6. Ion Gauge BD Missing 2 7. FDD Missing 1 8. DI/O BD Missing 1 9. AI/O BD Missing 1 10. Robot Indexer Cable Missing 1 11. CRT Missing 2 12. ESC Chuck Assy Ch#A,B Missing 2 13. Heater Lift Motor Missing 2 14. Matcher Missing 2 15. Compressor 3620-01389 Missing 2 16. Signal Cable Missing 1) Remote Rack to Ch#A Pump RJ13 - 50ft 0150-20678 Missing 1 2) Remote Rack to Ch#B Pump RJ14 - 50ft 0150-20678 Missing 1 3) Remote Rack to Buffer Pump RJ11 - 50ft 0150-20678 Missing 1 4) Remote Rack to LL Pump RJ12 - 50ft 0150-20678 Missing 1
Specifications
Manufacturer | AMAT |
Model | Centura PVD |
Condition | Used |
Stock Number | TC06182019002 |
Wafer Size | 200mm |