AMAT Complus 4T Inspection darkfield Inspection system

AMAT Complus 4T Inspection darkfield Inspection system

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Description

SW Ver:V10.6(516) Load port: TDK Robot Type:Yaskawa Laser working Hours:87918 hrs Laser Roll Over: 3.27 W

Specifications

ManufacturerAMAT
Year2007
ConditionUsed
Stock NumberOD8319
Wafer Size300mm