1998 Plasma-Therm SLR 770 ICP

As-is

- Last knows condition: operational, one analog I/O box is not working.

- Application: deep silicon etch

- Substrate size: 4”

- Semi-auto load lock, single wafer

- 1.0kW ICP RF package (2kW generator limited to 1.0kW)

- 500W RF bias

- Gas box with 5 lines (CHF3, C4F8, SF6, Ar, O2)

- ThermoFlex 900 chiller

- Edwards ih80 dry pump

- Edwards nxds load lock dry pump

- Load lock small turbo pump Leybold

- Edwards STPA-1303CV turbo

- 380VAC 3 phase

- Through-wall installation package