AMAT P5000 Etch

Applied Materials Precision 5000 (AMAT P5000) cluster tool and all spare parts. 
4-inch/100mm wafer kit, pump stand, power distribution, chillers, pumps, power supplies
Chamber A: Metal etch, not usable (needs new chamber)
Chamber B: Dielectric etch, fully functional
Chamber C: Polysilicon etch, not functioning, gas flow issues, new helium seals required
Chamber D: Not used, status unknown.