March PX1000 etcher

Batch systems for plasma cleaning or etching. Currently configured with only one 17 in. x 14 in. shelf set of 2 Shelves. Can accommodate multiple shelves. RFX-600 13.56 MHz, 600W RF generator. Two gas inputs, Gas Valve Assembly No Missing parts. Does not include vacuum pump. Batch systems for plasma cleaning or etching. Currently configured with only one 17 in. x 14 in. shelf set. Can accommodate multiple shelves. RFX-600 13.56 MHz, 600W RF generator. Two gas inputs. Does not include vacuum pump at this price, additional cost depending on type required.