TEL U2e-655II upgraded to U2e-855II Oxide Etcher

TEL U2e-655II upgraded to U2e-855II Oxide Etcher For sale is a TEL U2e-655II upgraded to U2e-855II Oxide Etcher. It is located in Asia. Please check below for the configuration. Configuration: 1) MFC(MASS FLOW CONTROLLER) GAS NO. GAS MAME MFC SIZE(SCCM) MAKER MODEL GAS #1 C4F8 50 SAM SFC-1480F GAS #2 Ar 1000 SAM SFC-1480F GAS #3 O2 20 SAM SFC-1480F GAS #4 CHF3 100 SAM SFC-1480F GAS #5 O2 100 SAM SFC-1480F GAS #6 CF4 100 SAM SFC-1480F GAS #7 N2 100 AERA FC-780XC GAS #8 CF4 ( 0.419 ) 5 AERA FC-780XC   2) AC-2 Controller (MAIN PRESSURE CONTROLLER) APC(Auto Pressure Controller) ITEMS Maker MODEL Attachment REMARK   APC VAT 61146-PH52-ABM1 OK VAT 61146-PH52-ABM1 OK 3) Gauge GAUGE Unit Maker Model Range REMARK Baratron MILLIPORE CDLD-01S12E 1 PA/133.32 PC1   Baratron MILLIPORE CDLD-01S12E 1 PA/133.32 PC2 Baratron MKS 622A01 TDE 1 PA/133.32 TC 4) Load station hardware configuration SYSTEM   Description Maker Model REMARK   1.TMP MITSBISHI FT-1200W   MITSBISHI FT-1200W 2.TMP Controller MITSBISHI FT-1200W MITSBISHI FT-1200W 3. ROBOT YASKAWA VS2C 4.Robot Controller YASKAWA SRC-?017 5. EPD TEL SE-2000 6. UPS 7.Generator PEAL RP-3000-27M PC1 TOP PEAL LP-2000-800K PC1 BOT PEAL RP-3000-27M PC2 TOP PEAL LP-2000-800K PC2 BOT 8.Matcher PEAL M-30AW2VD-27M PC1 TOP   PEAL M-20A2LS-U2-4 PC1 BOT PEAL M-30AW2VD-27M PC2 TOP   PEAL M-20A2LS-U2-4 PC2 BOT   6)  Function Check SUB MODULE UNIT MAKER MODEL JUDGE REMARK   1.Dry Pump EDWARD IGX-100L OK CC   EDWARD IL-600 OK TC   EDWARD IH-80 OK PC1   EDWARD IH-80 OK PC2 2.Chiller SMC INR-341-42B1-X134 OK PC1 SMC INR-341-42B-X1134 OK PC2