Asyst RLS 150/A Reticle stocker

Asyst RLS 150/A Reticle stocker

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Description

Tooltyp RLS 150/A Vendor: Asyst Serial number 1295xxx description 1428 Slots, Barcode Reader, Particulate Monitor System

Specifications

ManufacturerAsyst
ModelRLS 150/A
Year1995
ConditionUsed
Stock NumberOD4818
Wafer Size150 reticle