1997 DNS SS-W80A-AR

DNS_SS-W80A-AR

OEM : DNS

MODEL : SS-W80A-AR

SERIAL NO. : 56700-2228

VINTAGE : MAR.1997

WAFER SIZE: 8 INCH

PROGRESS TYPE: WET/ CMP

COMPONENT :

MAINFRAME

CHEMICAL CABINET

LOAD PORT

NEC FC-9821X PC

SUPER VEXTA UDX5107 5-PHASE DRIVER

PS-500 UPS INSTALLED

YASKAWA CESA SERIES SERVO CONTROLLER

EBARA PJ-100 CHEMICAL PUMP

Dimension

MAIN FRAME 60×60×80

LOAD PORT 62×32×72

CHEMICAL CABINET 45×30×75

PALLET-1: MISC. PARTS 45×54×25