TEL Lithius 1+ (ArF immersion track)

TEL Lithius 1+ (ArF immersion track)

2008 Vintage

300 mm wafers

Software version 300.0.71.3

SECS communication

5 FOUPS front end

3 x COT (coaters)

3 x ITC (Immersion track coaters)

2 x BCT (bottom track coaters)

4 x DEV (developers)

2 x PIR (post develop infra red stations)

16 x CPHP  (critical precision hot plates)

7 x EPHP (edge precision hot plates)

11 x HCP (Hot/chill plate)

12 x TRS

2 x INCP

1 x Power Box

1 x Chem Cabinet for Coat

1 x Chem Cabinet for Develop

2 x Temp and Humidity controllers