TEL Lithius 1+ (ArF immersion track)
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TEL Lithius 1+ (ArF immersion track)
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Description
TEL Lithius 1+ (ArF immersion track)
2008 Vintage
300 mm wafers
Software version 300.0.71.3
SECS communication
5 FOUPS front end
3 x COT (coaters)
3 x ITC (Immersion track coaters)
2 x BCT (bottom track coaters)
4 x DEV (developers)
2 x PIR (post develop infra red stations)
16 x CPHP (critical precision hot plates)
7 x EPHP (edge precision hot plates)
11 x HCP (Hot/chill plate)
12 x TRS
2 x INCP
1 x Power Box
1 x Chem Cabinet for Coat
1 x Chem Cabinet for Develop
2 x Temp and Humidity controllers
Specifications
Manufacturer | TEL |
Model | Lithius 1+ (ArF immersion track) |
Condition | Used |
Stock Number | GOD17072024 |