Tegal TEGAL 981
Tegal TEGAL 981
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Description
Single chamber silicon nitride etcher. Status: In Storage
8"
Single chamber silicon nitride etcher
Specifications
| Manufacturer | Tegal |
| Model | TEGAL 981 |
| Condition | Used |
| Stock Number | GOD13092017-005 |
| Wafer Size | 8 inch |