DNS WS-820L Automated wafer cleaning system
DNS WS-820L Automated wafer cleaning system
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Description
DNS WS-820L Automated wafer cleaning system
2011
4 robots
Condition:
Complete like new working condition, only used during acceptance, no production. No de-installed and in storage.
Click below link for video:
Video of DNS 820L running 100 Wafers with DNS Engineer
Configuration:
Automated Alpha Tool (Double Sided Porous Silicon: 25 wafer batch) based on WS-820L platform retrofittable to 50 wafer batch double sided
Wafer size 200mm
Wafer Flow Left to right
Cassette included
Components to include:
Main body – 1 unit
Loader – 1 unit
Unloader – 1 unit
Two robots for bath to bath transfer systems – one robot for wet wafers and one for dry wafers;
Robot arms to be Teflon coated quartz - 2 units
Double Sided Porous Silicon bath – 1 unit
Electrical Breaker Box for U.S. safety regulation
CD ROM Manuals
Material is FM-PVC to meet FM4910 criteria
System description:
Position 1 : Loader (CTC type)
Position 2 : CHCL (Robot Chuck Clean)
Position 3 : PS (Single-Double Sided Porous Silicon bath)
Position 4 : QDR (Quick Dump Rinse)
Position 5 : SD (Spin Dryer)
Position 6 : Unloader (CTC type)
Other components:
Notch Aligner
Wafer Counter
Fire extinguisher system for PS bath
HF49% replenishment function for PS bath
IPA replenishment function for PS bath(w/ anti explosion)
Specifications
Manufacturer | DNS |
Model | WS-820L, DNS cleaning track |
Year | 2011 |
Condition | Used |
Stock Number | L037 |
Wafer Size | 200mm |