DNS SS-80BW-AR

Config: 2F2B

Indexer, 2-SSW, 2-SSR, 2-RVS(R/R)

Open Cassette Type: 4-stage

Main Controller: NEC Industrial PC

Language: English version

Top-side Spin Unit

Nano Spray with Brush, Back-rinse, DI-1, -2

Vacuum Chuck

Back-side Spin Unit

Nano Spray with Brush, DI-1, -2

Magnetic Chuck

Main Power Box

Nano Spray Controller Box

Provide water leakage SUS plate and sensor for main body and nano spray controller

Mechanical Test: 500 wafers

Main body: 1450 x 1950 x 1500mm, weight: ab. 1800kg

Power Box: 500 x 600 x 600mm, weight: ab. 80kg

Nano spray controller unit: 500 x 600 x 1200, weight: ab. 90kg

Optional Items(not included):

DI Water Filter

FFU system(Full covered on main body)