2007 Hitachi S 4800 II SEM

- Secondary electron image resolution:

- 1.0nm (15kV, WD=4mm)

- 1.4nm (1kV, WD=1.5mm, Deceleration mode)

- 2.0nm (1kV, WD-1.5mm, Normal mode)

Magnification:

- LM mode: 20 ~ 2,000X

- HM mode: 100 ~ 800,000X

Specimen Stage:

- Stage Motorization: 5 axis motorized

- Type II: X: 0 ~ 110mm; Y: 0 ~ 110mm, Z: 1.5 ~ 40mm; T: -5 ~ +70 deg, R: 360 deg.

- Operating System: Windows XP Professional

Options:

- Trackball for stage control

- TE (STEM) detector

- Video Amplifier unit

- Photomultiplier Power Supply

- Deceleration function

- Electrostatic beam blanking unit

- Quartz PCI

- Chamber camera

- RS-232C

- Dry roughing pump

2007 Vintage