2007 Hitachi S 4800 II SEM
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2007 Hitachi S 4800 II SEM
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Description
- Secondary electron image resolution:
- 1.0nm (15kV, WD=4mm)
- 1.4nm (1kV, WD=1.5mm, Deceleration mode)
- 2.0nm (1kV, WD-1.5mm, Normal mode)
Magnification:
- LM mode: 20 ~ 2,000X
- HM mode: 100 ~ 800,000X
Specimen Stage:
- Stage Motorization: 5 axis motorized
- Type II: X: 0 ~ 110mm; Y: 0 ~ 110mm, Z: 1.5 ~ 40mm; T: -5 ~ +70 deg, R: 360 deg.
- Operating System: Windows XP Professional
Options:
- Trackball for stage control
- TE (STEM) detector
- Video Amplifier unit
- Photomultiplier Power Supply
- Deceleration function
- Electrostatic beam blanking unit
- Quartz PCI
- Chamber camera
- RS-232C
- Dry roughing pump
2007 Vintage
Specifications
Manufacturer | Hitachi |
Model | S 4800 II SEM |
Year | 2007 |
Condition | Used |
Stock Number | BM4042 |