DNS SS-80BW-AR 2F2B
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DNS SS-80BW-AR 2F2B
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Description
Config: 2F2B
Indexer, 2-SSW, 2-SSR, 2-RVS(R/R)
Open Cassette Type: 4-stage
Main Controller: NEC Industrial PC
Language: English version
Top-side Spin Unit
Nano Spray with Brush, Back-rinse, DI-1, -2
Vacuum Chuck
Back-side Spin Unit
Nano Spray with Brush, DI-1, -2
Magnetic Chuck
Main Power Box
Nano Spray Controller Box
Provide water leakage SUS plate and sensor for main body and nano spray controller
Mechanical Test: 500 wafers
Delivery: Approx. 3-month. ARO / EXW Korea
Warranty: 3-month / On-call Service
Main body: 1450 x 1950 x 1500mm, weight: ab. 1800kg
Power Box: 500 x 600 x 600mm, weight: ab. 80kg
Nano spray controller unit: 500 x 600 x 1200, weight: ab. 90kg
If needed tool installation,
Scope: Tier-1(Particle Check, > .16㎛ on Bare(Prime) Si Wafer(Notch, 0.75um)
Work: 2-engineer x 2-week
Optional Items(not included):
DI Water Filter
FFU system(Full covered on main body)
Specifications
Manufacturer | DNS |
Model | SS-80BW-AR 2F2B |
Condition | Refurbished |
Stock Number | GOD23082023720223332 |