TEL a-303i-H Low Temperature Alloy/Anneal System
TEL a-303i-H Low Temperature Alloy/Anneal System
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Description
TEL a-303i-H Low Temperature Alloy/Anneal System for SALE
Includes Full Set of Quartzware
De-installed from running condition
Low temp atmospheric sinter-alloy/anneal process with 4%H2 in N2 + O2
Immediately available
Details
TEL a-303i-H Low Temperature Alloy/Anneal System: Fo Sinter Process
Quartzware: Boat/Pedestal/Process Tube: 100 wafer production load, 117 slot quartz boat, Quartz pedestal, Quartz single process tube, no liner, Tube Sealing: Lip seal
Process Pressure and Temperature: -50pa, 400°C
Heater Element: Low-Temp: VMM-56-104, 150-600°C
Specifications
Manufacturer | TEL |
Model | a-303i-H |
Condition | Used |
Stock Number | god14112016 |