Hitachi Spare Parts

Hitachi Spare Parts OEM TOOL TYPE TOTAL COUNT PART NAME PART NUMBER ON ITEM HITACHI CD-SEM S-8820 7 TURBOTRONIK NT10 FAB NO 85701 / Z9700155 HITACHI CD-SEM S-8820 6 TURBOTRONIK NT 340 M HITACHI CD-SEM S-8820 8 CAMERA ASSEMBLY (SONY) 113680 HITACHI CD-SEM S-8820 7 STACK TURBO PUMP HITACHI CD-SEM S-8820 7 LOAD LOCK TURBO PUMP HITACHI CD-SEM S-8820 4 HARD DRIVE UNIT 343976    hd-bignl HITACHI CD-SEM S-8820 6 ETCH PROCESS PUMP D37209100 HITACHI 308 6 MASS FLOW SYSTEM 1001354 HITACHI 308 4 RF POWER GENERATOR HITACHI 308 4 TUNER CONTROLLER HITACHI 308 2 ETCHING CHAMBER TEMP CONTROLLER HITACHI 308 2 BUFFER CHAMBER TEMP CONTROLLER HITACHI 308 1 LCD1012X HITACHI 308 1 TOUCH SCREEN  MONITOR HITACHI 308 1 TOUCH DATA CONTROLLER HITACHI 1 BELLOWS 3REA043343 HITACHI 2 CKD 1/2 SOLENOID VALVE 3ROT004194 HITACHI 2 CLAMP,T-80 3ROT002834 HITACHI 2 UNIBODY TORCH 3HOT023559 HITACHI 2 B32 DX COMPUTER PC-SD40 HITACHI CD-SEM 1 LAZER POWER SUPPLY 2111A-20SLAT / 8462 HITACHI CD-SEM 1 STACK TURBO PUMP ? HITACHI CD-SEM 1 STAGE LAZER 1738129 HITACHI CD-SEM 1 TURBOTRONIC NT10 857-01 HITACHI CD-SEM 1 3 AXIS ROBOT 323703 HITACHI CD-SEM 1 CAMARA MODULE 6712-2000/0000 HITACHI CD-SEM 2 DIGITAL DATA STORAGE 19308111-01 HITACHI CD-SEM 7 ROBOT 00-8163 HITACHI CD-SEM 1 ROBOT ARM NM4050 HITACHI CD-SEM 1 CAMARA DRIVE TRK2/3 8943AL139/1709/9 HITACHI 10 PC AN09SA8570 HITACHI 1 MEC CONTROLLER 31390-002 HITACHI 1 SPIKE TC OVERHEAT DETEC 5TOT052980 HITACHI 1 COGNEX BOARD 203-0026 HITACHI 1 BAFFLE 7400-0136-01B HITACHI 1 VACUUM PIPE 4QOD179653 HITACHI 1 DIGI CAT COMBUSTIBLE GAS TRANSMITTER 2414-0020 HITACHI 9 PCB DISI-2 HITACHI 1 PCB PTPI-I HITACHI 8 PCB SBCO9-2 HITACHI 14 PCB D024-2 HITACHI 8 PCB MM96-2 HITACHI 8 PCB LANI-4 HITACHI 1 RF POWER GENERATOR HITACHI 1 BUFFER CHAMBER TMP CONTROLLER HITACHI 3 TOUCH DATA MONITOR BE6138A2 HITACHI 1 VIDEO MONITOR VM-920-S2 HITACHI 1 DUAL CASSETTE HANDLER CARD 249181 HITACHI 1 ECPU263 271-2863 HITACHI 1 SG/VA 568-5510 HITACHI 1 MEM 568-5502 HITACHI 1 PSDISP 568-5559 HITACHI 1 SEMPANEL/CONTROL PANEL 568-5556 HITACHI 1 OPTAFC 568-5544 HITACHI 1 SIGNAL TOWER INTERFACE CARD 238781 HITACHI 1 STSENSE 569-5505 HITACHI 2 PWB ASSY 248411 HITACHI 1 VME/OVERLAY INTERFACE 8946-0001 HITACHI 1 DUAL CASSETTE HANDLER BOARD 249141 HITACHI 1 UNICASSETTE SYSTEM INTERCONNECT BOARD 250261 HITACHI 2 ETCHING CHAMBER TMP CONTROLLER HITACHI 3 M.W. GENERATOR PH1117A Hitachi Etch 1 Rf Generator CF-500-400k Hitachi Etch 1 Tuner Controller ZDK-916L2C-P Hitachi Etch 1 EC Mag P/G ES7 Hitachi Etch 1 Upper Coil Power Supply KDS-30350 HITACHI 1 TRANSFER ROBOT M-712E HITACHI 1 SUSCEPTOR 2-829527-03 HITACHI 1 BUTTERFLY VALVE UNIT 21251-10032-001 HITACHI 3 ELECTRICAL UNIT 20020-38107 HITACHI 1 MAINFRAME/VAC PUMP 691-HD02 HITACHI 1 HP QUATPUMP G1311A HITACHI 1 HP LASERJET 4200 HITACHI 1 AGILENT 110 SERIES G1316A HITACHI 1 NOISE FILTER 3SUP-H100H-ER-4 HITACHI 3 TDK NOISE FILTER ZACT2280-ME HITACHI 1 OKAYA NOISE FILTER 3SUP-H100H-3R-4 HITACHI 1 COSEL POWER SUPPLY P50E-24 HITACHI 1 HEATER TRANSFER UNIT 99602901 HITACHI 1 POWER UNIT 99603001 HITACHI 1 DC P4-S UNIT NO NUMBER HITACHI 1 LCD CONTROL SCREEN NO NUMBER HITACHI 1 PLC CABINET NO NUMBER HITACHI 1 PLASMA GENERATOR SMA-20B HITACHI 1 MYDAX CHILLER IVL5WB HITACHI 1 CONSOLE PLY CONSOLE HITACHI 1 POWER GENERATOR UNIT PLY 401 HITACHI 1 STP CONTROL UNIT SCU-301 HITACHI 1 BUEHLER CONTROLLER ECOMET 3 HITACHI 2 ELECTRONIC WATER PUMP RFDS 2000-2V