Cymer ELS 4000D Laser System

Cymer ELS 4000D Laser System

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Description

Cymer ELS 4000 Laser System

248nm KrF Excimer DUV laser 

Max average power 50 W

Max pulse energy 0.5 J

Duration 10-50 ns

Specifications

ManufacturerCYMER
ModelELS-4000D
Year1993
ConditionUsed
Stock NumberGOD18012016-086