Karl Suss MA25 Mask Aligner

Karl Suss MA25 Mask Aligner Download the Spec Sheet below. Karl Suss MA25 mask aligner configured for simultaneous double side exposure and manual operation of wafers with a maximum wafer diameter of 5" and maximum mask size of 6" x 6". Tool is equipped with diffraction reducing optical systems and 350W HBO lamps. Tool features choice of bright field and dark field illumination, an alignment accuracy between upper and lower side of the wafer of <2 microns, and alignment table rotation of <2 degrees.