TEGAL 901 N°2

Wafer Size: 6 inch TEGAL 901 DRY ETCH Poly/SiNSiC Gases used; SF6-N2-CHF3-He-O2 Mass flow  UNIT UFC1100A tegal2 O2          50sccm CHF3     50sccm CF4        50sccm SF6         100sccm N2          225sccm Pompa da vuoto 60L/min Tegal2 Transport Endunit Board: 99-247-XXX Transport Endunits: CW1078-A01XX RF generator: ACG10 Display Assembly CMXXXX-002XX Terminal Assembly 80-055-105 (non sono sicuro) Clean Channel Installed