Electrotech PECVD ND 5
Electrotech PECVD ND 5
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Description
ELECTROTECH PECVD DEP SiN-SiC (Sio2)
Wafer Size: 6 Inch
Gases Used:
CF4-O2-Ar-N2-N2O-SiH4-NH3-5%SiH4/Ar-CH4
Specifications
| Manufacturer | ELECTROTECH |
| Year | 1995 |
| Condition | Used |
| Stock Number | EV005 |