2002 Novellus Gamma 2100

Photoresist stripper etcher

- 2 loaders for 8" open cassette
- Signal Tower: Patlite, WME-EN
- Monitor: LCDSA141 (x2)
- RF Generator: Adtec, AX-1000II (x3)
- Pirani Vacuum Transducer: MKS 325 Moducell (1)
- Pressure Control Valve: MKS 153
- Pressure Gauge: MKS 622
- Temp Controller: Watlow, 988 Series (x8)
- 208V, 3 Phase, 4 wires, 60A, 50/60 Hz
- HDD / software: missing
MFC:
- Gas: UFC-8160,O2 / Scale: 5L
- Gas: UFC-8160, CF4 / Scale: 200sccm
- Gas: UFC-8160, O2 / Scale: 5L
2002 Vintage