Mattson Aspen II

Stripper

(2) ASYST SMIF System extended reaches

(2) Resist strip chambers

(2) RF10S Generators

RFS1000 RF Match

Splitter

Manometers:

Chamber manometer

LL Manometer

Shuttle manometer

Pumps:

A30W Chamber pump

A10S Shuttle pump

Dry pump

MFC: O2, C2F6, Cf4

Heater block

WATLOW/ EUROTHERM Temperature controller

AC and DC Box

Cards:

DIO

Analog

Robot assembly

Robot arm

Z-Axis stepper control card

X, Y, Z-Axis motors

Shuttle assmbly

Pumping: CV/TV Valves

Pressure controller

CDA: Pneumatic control