Karl Suss MA200 GEN3 Mask Aligner

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Description

Machine base frame for modules I/O port, robot handling, prealignment and alignment/ exposure

Includes vibration isolation

Mask aligner with motorized 3-axis mask stage, 2x TSA 3 axis microscope stages, motorized chuck z axis and rotation; high accuracy linear transport system from prealigner to mask stage


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Specifications

ManufacturerKarl Suss
ModelMA200 GEN3 Mask Aligner
ConditionUsed
Stock NumberBM4018