PLASMA-THERM Versaline CVD 3 Chamber

3x CVD Versaline Chambers

2x PCVD Versaline Chambers

1x HDP-CVD Versaline Chamber (new Condition)

3x PM Modules

1x Brooks MX600

Complete

Includes HDD and operating system, Manuals and versaline software. .

If interested I can get you pictures