2017 EVG 6200 NT
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2017 EVG 6200 NT
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Description
- Double side
- Manual handling
- Exposure Modes: Hard, Soft, & Vacuum Contact
- Separation Distance: 0 - 300 µm adjustable via software
- Wafer Thickness: 0.1 - 10 mm (For Top Side)
- Semi Automatic Loading with Mechanical Prealignment on Chuck
- Quick change of Mask and Chuck
- One Stage Rack for Up to 5 Aligner Tools
- EC Decleration of Conformity (Certification done by EVG)
- PC Controlled Operational Environment
- Solid State Drive and Hard Drive for High Availability and Reliability
- Graphical User Interface (GUI) for Visualization
- User Interface Including Keyboard and Monitor
- Granite Base Frame Construction and Active Vibration Isolation
2017 Vintage
Specifications
Manufacturer | EVG |
Model | 6200 NT |
Year | 2017 |
Condition | Used |
Stock Number | BM3999 |