Mitsui Shibaura CDE8 DRY Etch 8 Inch

Still in FAB With SMIF Loader The Equipment includes -Main Body, Controller, CRT and Keyboard Wafer Size 200mm Gas System 5 MFC Tylan FC-2900 CF4, C12, N2, O2, NF3 Quartz Tube Protection Ceramic Tube Electrostatic chuck. Chiller Neslab HX-75 Power Source 200V- 3PH , 14KVA Configuration: Through the Wall SUS front Panel Ni Coated Al side Panel Pump Interface Edwards EH250 Roots Blower/Edwards Dry Pump