AVIZA High Temp Furnace VTR 7000 x 4

General ? VFA8 & 11 – High Temperature Furnaces. Maximum temperature 1300°C. ? VFA9 & 10 – Mid Temperature furnaces. Maximum temperature 1100°C. ? All fitted with a UPS o VFA8 & 9 with Matrix UPS 3000, battery type and o VFA10 & 11 with Levitron U3000-ONL ? All fitted with 6 position Carousels and LPT2200 Asyst Loaders. ? All fitted with External Torches. Hydrogen connected to the centre port and Oxygen connected to the side port. ? CDA supply pressure – 80 psi ? Extract – 200 to 400 cfm ? Process Cooling Water Flow – 2 to 5 gpm ? Process Vacuum – 20”