2021 Semics Opus 3 SD Prober

6", 8", 12" 

X, Y Probing Area:
- X: ±180mm
- Y: ±175mm
Needle Force: 450kgf
XY Accuracy:
- X: +1.um
- Y: ±1.um
Tri-Temp:
- Cold: -40*C / -55*C
- Hot: 150*C / 200*C
- Ambient Control (25*C)
- Universal probe card changer
- Temperature control
- Real time recipe validation
- Intelligent pin alignment algorithm
- Smart probing route algorithm
- Flat loader
With Chiller
2021 Vintage