Canon FPA 2500 i 2 Stepper

- Can be used with a 6” reticle wafer- Numerical aperture of 0.54 / 0.45- image field of 22 mm [(X)17mm x (Y)26mm]- Printing wavelength of i-line (365 nm)- Resolution of 0.45 μm- Illumination lamp of 1.5 kW super-high-pressure mercury- Illumination uniformity of ≤ 1.2 %Alignment Modes:- TTL Off-Axis He-Ne TV- TTL Off-Axis Broad Band TV- With an alignment light source of He-Ne laser (633 nm) and Halogen lamp- Alignment accuracy is ≤ 0.1 μm (mean + 3 σ)- Its throughput is ≥ 52 wafers / hour (8”, 60 shot)