Canon FPA 2500 i 2 Stepper
![Used Canon FPA 2500 i 2 Stepper](https://i.machineryhost.com/fc49306d97602c8ed1be1dfbf0835ead/fffa3644b95db0bc4fcca7cccd91f2cc/large-used-canon-fpa-2500-i-2-stepper.jpg)
Canon FPA 2500 i 2 Stepper
Contact us for price
Available quantity:2
orCall +353 (0) 87 192 1110
Description
- Can be used with a 6” reticle wafer- Numerical aperture of 0.54 / 0.45- image field of 22 mm [(X)17mm x (Y)26mm]- Printing wavelength of i-line (365 nm)- Resolution of 0.45 μm- Illumination lamp of 1.5 kW super-high-pressure mercury- Illumination uniformity of ≤ 1.2 %Alignment Modes:- TTL Off-Axis He-Ne TV- TTL Off-Axis Broad Band TV- With an alignment light source of He-Ne laser (633 nm) and Halogen lamp- Alignment accuracy is ≤ 0.1 μm (mean + 3 σ)- Its throughput is ≥ 52 wafers / hour (8”, 60 shot)
Specifications
Manufacturer | Canon |
Model | FPA 2500 i 2 Stepper |
Condition | Used |
Stock Number | BM3947 |