1998 KLA-Tencor Prometrix SFS 6220 Wafer Testing and Metrology

It was fully operational when last in use. 

It's a complete tool.

Including:

• Indicator:180122 [indexer left photodiode assembly]

• Indicator:180211

• Silicon reflector:228192 [silicon reflector strip assembly]

• Vacuum regulating valve: 283754 (V-800-30)

• Time measurement pin: 174718

• Laser tube:TT-365998-1 [JDS UNIPHASE 2214-30SLQT LASER]

• Motor:371874

• Gate motor:0375740-000

• CPU motherboard

• GPIB circuit board

• HAZE circuit board

• Power supply module

• Laser controller