NIKON NSR-S308F

Wafer Size 300mm

Vintage TBC

More spec. available in images

Resolution ≦ 90nm

Overlay accuracy ≦ 8nm

Reduction projection optical system

Reduction ratio 1:4

N.A. 0.55~0.92

Dynamic distortion ±8nm

Maximum exposure field 26nm x 33nm

Exposure light source ArF excimer laser (193nm wavelength)

Wavelength stability ≦±0.02pm (Average scan travel time)

FWHM ≦0.20pm

Illumination optical system

Image plane illumination 240

Maximum exposure frequency 4,000Hz

Exposure uniformity ≦±1.0%

Auto focus / Leveling

Detection method 2D Multi point

Repeatability

Stroke 2mm

Focus offset input range ±10μm

Auto focus tracking range ±0.1mm

Leveling offset input range ±20μrad

Number of auto focus spot Up to 12 points can be select