2004 AMAT Centura RTP

2 same config available

2 Xe chambers and 2 cool down chambers.

WAFER SIZE: 8 INCH

PROGRESS TYPE: 

CHAMBER POSITION:

CH A - RTP

CH B - RTP

CH C - EMPTY

CH D - EMPTY

CH E - COOLDOWN

CH F - COOLDOWN

Buffer ROBOT : HP

CHILLER #1 : N/A

CH #A CONFIG 

- TURBO :N/A 

- C/M :  

-SCR POWER CONTROLLER : SN  

-ASTEX : 2495-I

Gas Panel MFC GAS/LIQ Size 

A 6 O2 200 sccm  

7 O2 10 slm  

8 N2 10 slm   

NO 5 slm

CH #B CONFIG 

- TURBO :N/A 

- C/M :  

-SCR POWER CONTROLLER : SN  

-ASTEX : 5312

B MFC GAS SIZE

10 N2 10 slm 

11 H2 1 slm  

12 H2 10 slm 

15 O2 200 sccm 

16 O2 20 slm 

17 N2 20 slm