2009 TEL Lithius

Tool Status Connected

Wafer Size 300 mm

Fab Section Lithography

Asset Description ALC1420TRK

Software Version 300.0.96.2

CIM SECS, GEM

Process KrF Litho

Handler System PRA/CRA/IRAI/PRAI

Factory Interface FOUP 5

DEV Cabinet L3 1

COT Cabinet L2 1

AC Power Box M1 1

System T&H Controller F1/F2 2

Resist Cabinet L1 1