2009 ASM ASM3200

Tool Status Connected

Size 300 mm

Fab Section Diffusion

Asset Description Epsilon3200 Single WFR Epitaxial Reactor

Software Version V7.50.02

CIM SECS

Process EPITAXY PROCESS

Main System Epsilon 3200 1

Handler System GEN MARK 1

Chamber Pump 2

Burn Box 1

Load Lock Pump 2

Missing/ Faulty Parts/ Accessories List:

GEN MARK controller 1

Burn Box 1