1999 Gasonics PEP-4800DL
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1999 Gasonics PEP-4800DL
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Description
Concept Part Solutions, Inc., PEP-4800DL, 200mm
No loadports included.
Description HIO process
Year of Manufacture 1999
Tool Status Running Wafers
Wafer Size 200 mm Fab Section Etch
Model PEP-4800DL (L), PEP-4800DL (R).
Vintage 1999
Asset Description GASONICS SODIUM REMOVAL
Software Version VER 4.0
CIM SECS
Process HIO
Main System MAIN TOOL 1
Factory Interface SMIF 2
Options System MW GENERATOR 2
Options System RF GENERATOR 2
EBARA DRY PUMPS 2
MAIN WALLBOX 1
CHILLER 2
Specifications
Manufacturer | Gasonics |
Model | PEP-4800DL |
Year | 1999 |
Condition | Used |
Stock Number | BM3639 |