2001 KLA 2139

This is a brightfield patterned surface defect inspection system. The tool is complete

8"/200mm

OEM Model Description

The 2139 wafer inspection system offers sensitivity and productivity enhancements for IC manufacturers. It is available as an independent tool or as an upgrade to existing 2135 and 2138 tools, allowing manufacturers to extend the life of their current KLA-Tencor tools. The 2139 is based on KLA-Tencor’s proven image processing technology and includes features such as ultra-broadband illumination and Segmented Auto Threshold technology. It is also available with an integrated SMIF mini-environment.