2007 TEL Lithius track

Condition: “As is” 
Date of manufacture: 2007

Wafer size 300mm

The TEL CLEAN TRACK LITHIUS is a 300/200mm

coater/developer. In response to drastically

fluctuating market needs, the CLEAN TRACK

LITHIUS was developed based on three

concepts: improved processing, short cycle

times, and enhanced network solutions. It

achieves increased responsiveness and

stability for important process technologies,

shorter lead and start-up times, and allows for

easier modifications.