2000 KLA UV1080-01
2000 KLA UV1080-01
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Description
Wafer Size Range
Minimum
150 mm
Maximum
200 mm
Set Size
200 mm
Year of Manufacture
2000
Condition
Good
KLA-Tencor - Tool in production
-Measures Film Thickness, Refractive Index (RI) and Extinction Coefficient of Single and Multi-Layer Thin Film Stacks Simultaneously without Referencing
Specifications
| Manufacturer | KLA |
| Model | UV1080-01 |
| Year | 2000 |
| Condition | Used |
| Stock Number | BM3403 |