2005 UNAXIS CLC200 PVD Sputter

• Number of Chambers: 6
• Accessories: We sell the whole tool with all accessories
• CE Marked: YES
• Year of Manufacture: 2005
• Condition: Excellent

Chambers:

• PM2 is a clean chamber an is RF Supplied
• PM4 is RF and DC Power Supplied
• PM1, PM3, PM5 and PM6 is DC power supplied

The exact tool model is specific defined as: Unaxis CLN200-1. In the middle of the system you will find the transport module MX 800 with a MagnaTran MAG 7. A so called `Toplinger` and two cassette stations VCE6 are further components.

The tool has 6 process chambers

• One (P2) is a etch chamber (SEQ151)
• The other modules (P1,P3,P4, P5 and P6) are PVD modules (ARQ151)  

Configuration:-

Tool model: CLN200-1

Transport module: Brooks MX800 with Magnatran 7 Robot

Chambers

-Fitted with 6 process chambers

-PM2 chamber - Etch chamber

-PM1, PM3, PM4, PM5 and PM6 - PVD chambers

-One PVD chamber has a heated chuck (not currently working)

-Substances sputtered: Al, Ti, NiV and Ag

-Magnet Types:-

PM1 MB300DL

PM3 MB300DG

PM4 MN300DK

PM5 MB300DL

PM6 MB300DF

The equipment includes the following parts:-

-CTI Cryogenics Compressor Model 9600 qty 3 p.n 8135901G001

-PM1 NiSb

-PM2 Etch with AE PDX 1250 and AE RFX 600A

-PM3 Al

-PM4 Ti

-PM5 NiV

-PM6 Ag

-MC Server 102428276 FSK 12458

-CTC Server 102428276 FSK 12453

-Brooks p/n 002-9700-95

-CTI Onboard 8 Chamber Cryopumps p/n 8116139G001R with Onboard module

-Brooks Magnatran 7 Robot Model 003-1600-27

-Brooks Facet Node Breakout 002-2692-01

-Brooks LoadLock Node 002-2901-01

-VAT gate valves

-Loadlock turbo pumps: Pfeiffer TMH 261

-PMC II 102471819

-AE Pinnacle RFG p/n 3152415-105N 12 KW

-AE Pinnacle RFG p/n 3152391-102M 20 KW

-AE Pinnacle RFG p/n 3152391-102Q 20 KW

-AE Pinnacle RFG p/n 3152415-105N 12 KW

-AE Pinnacle RFG p/n 3152415-105N 12 KW