2005 UNAXIS CLC200 PVD Sputter

• Number of Chambers: 6
• Accessories: We sell the whole tool with all accessories
• CE Marked: YES
• Year of Manufacture: 2005
• Condition: Excellent

Chambers:

• PM2 is a clean chamber an is RF Supplied
• PM4 is RF and DC Power Supplied
• PM1, PM3, PM5 and PM6 is DC power supplied

The exact tool model is specific defined as: Unaxis CLN200-1. In the middle of the system you will find the transport module MX 800 with a MagnaTran MAG 7. A so called `Toplinger` and two cassette stations VCE6 are further components.

The tool has 6 process chambers

• One (P2) is a etch chamber (SEQ151)
• The other modules (P1,P3,P4, P5 and P6) are PVD modules (ARQ151)