2006 Rudolph MP200 Contactless Metal Thickness Measurement
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2006 Rudolph MP200 Contactless Metal Thickness Measurement
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Description
Description
- MP200 double path tool
- non copper tool; double path tool delay stage;
- 6 inch chuck
- Cooling Water Required Minimum Flow: 0.79 GPM (3.00 l/m)
- Minimum Temperature: 12 ºC (54 ºF, 285.00 ºK)
- Maximum Temperature: 20 ºC (68 ºF, 293 ºK)
- Operating Air Pressure 14.00 PSI (96,534.20 N/sq m)
- Vacuum Required 0.98 in Hg (24.89 mm Hg)
- Contactless metal thickness measurement
- Wafer Size Range 150mm - 200mm
- Multi-Layer Film Capacity: YES
- Micro Spot Optics: YES
- Wafer Mapping: YES
- Controller Type: PC Controller Type
- External Cooling: Water Cooled
- Cooling Water Required: Minimum Flow: 0.79 GPM (3.00 l/m) Minimum Temperature: 12 ºC (54 ºF, 285.00 ºK) Maximum Temperature: 20 ºC (68 ºF, 293 ºK)
- Operating Air Pressure: 14.00 PSI (96,534.20 N/sq m)
- Vacuum Required: 0.98 in Hg (24.89 mm Hg)
- Condition: Good
- Year of Manufacture: 2006
Specifications
Manufacturer | Rudolph |
Model | MP200 Contactless Metal Thickness Measurement |
Year | 2006 |
Condition | Used |
Serial Number | 1-00-MPC-1505-AK-09 |
Stock Number | Tara-124 |
Wafer Size | 150-200mm |