1997 AMAT Vision 200+

WaferSize 150mm (6 Inch)

Implant Disc 18 Site, Silicon Coated

Two-dimensional beam profiler

CE-Mark yes Average Uptime 85%

Computer System 147MHz Main & ES CPU

and Software 6.24 6.24 (needs a paid License from AMAT from new owner!)

Backup Disc SSD Drive

Cleanroom Monitor TFT

Remote Service Monitor TFT / homemade

Gasbox: calibrated for:

String #1 - SDS MKS-P2A 10 sccm Arsenic 

String #2 - SDS MKS-P2A 10 sccm Phosporus

String #3 - HP Unit UFC-8100 10 sccm N2

String #4 - HP Tylan FC-2900MEP   5 sccm BF3

External Inert Gas Feed and Purge

Source/Beamline

Source Chamber Shield Kit yes 1 included

Bernas yes 1 Spare available if needed

Mass Slit Shield Retrofit no

Implant:

New Infranor Amplifier Xtra Puls yes

Spin Amp Kollmorgen Servo Star S700 yes

Vacuum:

Terminal Rough Pump not included Edwards SetUp

Terminal Differential Pump Varian Membran Pump

Source Turbo Pfeiffer 1500

Beamline Turbo Pfeiffer 1200

Endstation Manifold Turbo Pump Pfeiffer  250

Endstation Rough Pump not included Edwards Setup

Endstation Differential Pump Busch Membran Pump

Cryo Compressor (2x) CTI 9600

Cryo Pump (4x) CTI 250F

4th cryo pump installed yes

50 Hz Frequency Kit yes

Information: Floppy Drive missing,

Homemade Service Monitor Solution;

no Roughingpumps included (Edwards SetUp)