TEL Mark 8
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TEL Mark 8
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Available quantity:1
Description
Condition: Used
Operational Status: In storage, came from a US fab.
Wafer Size: 8"/200mm
Vintage: 1997
Description: Complete, Working Condition, with no missing parts. Last used Q1 2023
Main Body Configuration
-Standard configuration includes items listed below
- (2) Coater module, including: Three (3) coat dispenses, 3 x TalonTech TP-12 pumps, max 1,000cP, Solvent Pre-wet, Programmable Topside Edge Bead Removal (TEBR), Back
- Rinse, solvent bath, customer supplied resist/solvent filters, programmable motor flange temperature control, programmable resist fluid temperature control, 10L local drain
- Tanks, rear exhaust connections
- (1) Developer module, including: Two H-nozzles, top and bottom D.I. Water rinse, customer supplied Develop/D.I. water filters, programmable motor flange temperature control, programmable develop fluid temperature control, 10L local drain tank, rear
- Exhaust connections
- (3) Digital vacuum sensors interlocked (one on each Spin Unit Process module)
- (1) Adhesion Plate (AD) thermal unit
- (6) Hot Plate (HP) thermal unit
- (5) Cool Plate (COL) thermal unit
- (1) Triple robotic substrate transfer arm with Teflon centering blocks
- (1) Carrier Station with four (4) cassette locations and vacuum free transfer arm
- (1) System Environmental Enclosure with FFU’s
- (1) Internal Rack (FTC), including: 2 Thermo-con circulation units, 1 SMC Thermo-con controller unit, 5 cooling power supplies
- (1) Internal Resist/Canisters/HMDS bubbler-drain bottle storage: Three 1 gallon resist bottles, HMDS bubbler and drain containers, two 1-gallon canisters – one for solvent;
- Two supplied for develop but QD’s to allow operation of one develop canister at a time
Inside System
- (1) AC Power Distribution Transformer, 480v/3 phase type
- (1) Recipe Cascading and Parallel SW option configuration activation
- (1) ARDiMuS, With SECS communication – with BU included
- (1) SEMI S2-93 safety compliant
Specifications
Manufacturer | TEL |
Model | Mark 8 |
Condition | Used |
Stock Number | GOD23082023720222963 |
Configuration | 2C 1D |