-12 RDS Resist Pumps installed, 4 in use (status of the other pumps is unknown)

-2 IC Coatercups installed

-Machine is sold with the following subcomponents

- Powersupply, TC-Rack, TH-Controller (ESA-S-C-02), External Chem. Cabinet

-Clean Hard Disk with OEM Operation system and Machine parameters

Estimated Move Out Date: 01.04.24

Appearance: good //function: working

Wafer Size Range Minimum 300 mm Maximum 300 mm

Condition Good

Year of Manufacture 2001

Exterior Dimensions Width 135.039 in (343.0 cm) Depth 93.307 in (237.0 cm)

Height 103.543 in (263.0 cm)

2001 TEL ACT12